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Improvement and Optimization of Electromagnetic Integrated Scanning Micromirror
In this paper, the effect of driving system on working performance of electromagnetic integrated scanning micromirror (ISM) is studied. To further improve the optimization design of the electromagnetic ISM, the detailed theoretical analysis, simulation analysis, and experimental test are carried out...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8539728/ https://www.ncbi.nlm.nih.gov/pubmed/34683264 http://dx.doi.org/10.3390/mi12101213 |