Enhancement of Electrical Properties of Sol–Gel Indium–Tin–Oxide Films by Microwave Irradiation and Plasma Treatment

We proposed the enhancement of the electrical properties of solution-processed indium–tin–oxide (ITO) thin films through microwave irradiation (MWI) and argon (Ar) gas plasma treatment. A cost- and time-effective heat treatment through MWI was applied as a post-deposition annealing (PDA) process to...

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Detalles Bibliográficos
Autores principales: Kim, Sung-Hun, Cho, Won-Ju
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8540513/
https://www.ncbi.nlm.nih.gov/pubmed/34683218
http://dx.doi.org/10.3390/mi12101167

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8540513/
https://www.ncbi.nlm.nih.gov/pubmed/34683218
http://dx.doi.org/10.3390/mi12101167

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