Hybrid Cell Structure for Wideband CMUT: Design Method and Characteristic Analysis

Capacitive micromachined ultrasonic transducer (CMUT) is an ultrasonic transducer based on the microelectromechanical system (MEMS). Wideband CMUT has good application prospects in ultrasonic imaging, ultrasonic identification, flow measurement, and nondestructive testing due to its excellent charac...

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Detalles Bibliográficos
Autores principales: Wang, Hongliang, Huang, Xiao, Yu, Lijun, Ding, Qi, Zhang, Hanqiang, He, Changde, Zhang, Wendong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8540624/
https://www.ncbi.nlm.nih.gov/pubmed/34683231
http://dx.doi.org/10.3390/mi12101180

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8540624/
https://www.ncbi.nlm.nih.gov/pubmed/34683231
http://dx.doi.org/10.3390/mi12101180

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