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Transferred metal gate to 2D semiconductors for sub-1 V operation and near ideal subthreshold slope
Ultrathin two-dimensional (2D) semiconductors are regarded as a potential channel material for low-power transistors with small subthreshold swing and low leakage current. However, their dangling bond–free surface makes it extremely difficult to deposit gate dielectrics with high-quality interface i...
Autores principales: | , , , , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
American Association for the Advancement of Science
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8550226/ https://www.ncbi.nlm.nih.gov/pubmed/34705513 http://dx.doi.org/10.1126/sciadv.abf8744 |