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Irradiation-driven molecular dynamics simulation of the FEBID process for Pt(PF(3))(4)
This paper presents a detailed computational protocol for the atomistic simulation of formation and growth of metal-containing nanostructures during focused electron beam-induced deposition (FEBID). The protocol is based upon irradiation-driven molecular dynamics (IDMD), a novel and general methodol...
Autores principales: | , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Beilstein-Institut
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8551874/ https://www.ncbi.nlm.nih.gov/pubmed/34760430 http://dx.doi.org/10.3762/bjnano.12.86 |