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Irradiation-driven molecular dynamics simulation of the FEBID process for Pt(PF(3))(4)

This paper presents a detailed computational protocol for the atomistic simulation of formation and growth of metal-containing nanostructures during focused electron beam-induced deposition (FEBID). The protocol is based upon irradiation-driven molecular dynamics (IDMD), a novel and general methodol...

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Detalles Bibliográficos
Autores principales:	Prosvetov, Alexey, Verkhovtsev, Alexey V, Sushko, Gennady, Solov’yov, Andrey V
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Beilstein-Institut 2021
Materias:	Full Research Paper
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8551874/ https://www.ncbi.nlm.nih.gov/pubmed/34760430 http://dx.doi.org/10.3762/bjnano.12.86

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