Preparation and Characterization of Pure SiC Ceramics by HTPVT Induced by Seeding with SiC Nanoarrays

Dense SiC ceramics were fabricated by high-temperature physical vapor transport (HTPVT) growth process using SiC nanoarrays as the crystal seeds, which was obtained by vacuum heat treatment of amorphous SiC films prepared by plasma-enhanced chemical vapor deposition (PECVD) with a porous anodic alum...

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Detalles Bibliográficos
Autores principales: Deng, Yu-Chen, Zhang, Nan-Long, Zhi, Qiang, Wang, Bo, Yang, Jian-Feng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8585333/
https://www.ncbi.nlm.nih.gov/pubmed/34771842
http://dx.doi.org/10.3390/ma14216317

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8585333/
https://www.ncbi.nlm.nih.gov/pubmed/34771842
http://dx.doi.org/10.3390/ma14216317

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