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Boron-Doped Diamond/GaN Heterojunction—The Influence of the Low-Temperature Deposition
We report a method of growing a boron-doped diamond film by plasma-assisted chemical vapour deposition utilizing a pre-treatment of GaN substrate to give a high density of nucleation. CVD diamond was deposited on GaN substrate grown epitaxially via the molecular-beam epitaxy process. To obtain a con...
Autores principales: | , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8585340/ https://www.ncbi.nlm.nih.gov/pubmed/34771852 http://dx.doi.org/10.3390/ma14216328 |