Wideband MOEMS for the Calibration of Optical Readout Systems

The paper proposes a technology based on UV-LIGA process for microoptoelectromechanical systems (MOEMS) manufacturing. We used the original combination of materials and technological steps, in which any of the materials does not enter chemical reactions with each other, while all of them are weakly...

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Detalles Bibliográficos
Autores principales: Volkov, Petr, Lukyanov, Andrey, Goryunov, Alexander, Semikov, Daniil, Vopilkin, Evgeniy, Kraev, Stanislav, Okhapkin, Andrey, Tertyshnik, Anatoly, Arkhipova, Ekaterina
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Communication
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8587753/
https://www.ncbi.nlm.nih.gov/pubmed/34770648
http://dx.doi.org/10.3390/s21217343

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8587753/
https://www.ncbi.nlm.nih.gov/pubmed/34770648
http://dx.doi.org/10.3390/s21217343

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