Burger Model as the Best Option for Modeling of Viscoelastic Behavior of Resists for Nanoimprint Lithography

In this study, Atomic Force Microscopy-based nanoindentation (AFM-NI) with diamond-like carbon (DLC) coated tip was used to analyze the mechanical response of poly(methyl methacrylate) (PMMA) thin films (thicknesses: 235 and 513 nm) on a silicon substrate. Then, Oliver and Pharr (OP) model was used...

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Detalles Bibliográficos
Autores principales: Grzywacz, Hubert, Jenczyk, Piotr, Milczarek, Michał, Michałowski, Marcin, Jarząbek, Dariusz M.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8587944/
https://www.ncbi.nlm.nih.gov/pubmed/34772164
http://dx.doi.org/10.3390/ma14216639

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8587944/
https://www.ncbi.nlm.nih.gov/pubmed/34772164
http://dx.doi.org/10.3390/ma14216639

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