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Implementation of SiN thin film in fiber-optic sensor working in telecommunication range of wavelengths
Mirrors are used in optical sensors and measurement setups. This creates a demand for mirrors made of new materials and having various properties tailored to specific applications. In this work, we propose silicon covered with a thin silicon nitride layer as a mirror for near-infrared measurements....
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8599665/ https://www.ncbi.nlm.nih.gov/pubmed/34789732 http://dx.doi.org/10.1038/s41598-021-00195-9 |