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Sn-Induced Phase Stabilization and Enhanced Thermal Stability of κ-Ga(2)O(3) Grown by Mist Chemical Vapor Deposition
[Image: see text] Tin (Sn)-doped orthorhombic gallium oxide (κ-Ga(2)O(3)) films were grown on (0001) sapphire by mist chemical vapor deposition. It is known that κ-Ga(2)O(3) is more stable than α-Ga(2)O(3) (corundum) but less stable than β-Ga(2)O(3) (monoclinic). This thermodynamic stability means a...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
American Chemical Society
2021
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8613876/ https://www.ncbi.nlm.nih.gov/pubmed/34841173 http://dx.doi.org/10.1021/acsomega.1c05130 |