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A highly stable, nanotube-enhanced, CMOS-MEMS thermal emitter for mid-IR gas sensing
The gas sensor market is growing fast, driven by many socioeconomic and industrial factors. Mid-infrared (MIR) gas sensors offer excellent performance for an increasing number of sensing applications in healthcare, smart homes, and the automotive sector. Having access to low-cost, miniaturized, ener...
Autores principales: | , , , , , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8616948/ https://www.ncbi.nlm.nih.gov/pubmed/34824328 http://dx.doi.org/10.1038/s41598-021-02121-5 |