Batch Fabrication of Wear-Resistant and Conductive Probe with PtSi Tip

This paper presents a simple and reliable routine for batch fabrication of wear-resistant and conductive probe with a PtSi tip. The fabrication process is based on inductively coupled plasma (ICP) etching, metal evaporation, and annealing. Si tips with curvature radii less than 10 nm were produced w...

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Detalles Bibliográficos
Autores principales: Liu, Meijie, Zhu, Yinfang, Zhao, Junyuan, Wang, Lihao, Yang, Jinling, Yang, Fuhua
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8619106/
https://www.ncbi.nlm.nih.gov/pubmed/34832738
http://dx.doi.org/10.3390/mi12111326

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8619106/
https://www.ncbi.nlm.nih.gov/pubmed/34832738
http://dx.doi.org/10.3390/mi12111326

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