Comprehensive Design Method of a High-Frequency-Response Fast Tool Servo System Based on a Full-Frequency Error Control Algorithm

With the development of optoelectronic information technology, high-performance optical systems require an increasingly higher surface accuracy of optical mirrors. The fast tool servo (FTS) based on the piezoelectric actuator is widely used in the compensation machining of high-precision optical mir...

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Detalles Bibliográficos
Autores principales: Li, Zelong, Guan, Chaoliang, Dai, Yifan, Xue, Shuai, Yin, Lianmin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8620653/
https://www.ncbi.nlm.nih.gov/pubmed/34832766
http://dx.doi.org/10.3390/mi12111354

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8620653/
https://www.ncbi.nlm.nih.gov/pubmed/34832766
http://dx.doi.org/10.3390/mi12111354

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