Metamaterial-Engineered Silicon Beam Splitter Fabricated with Deep UV Immersion Lithography

Subwavelength grating (SWG) metamaterials have garnered a great interest for their singular capability to shape the material properties and the propagation of light, allowing the realization of devices with unprecedented performance. However, practical SWG implementations are limited by fabrication...

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Detalles Bibliográficos
Autores principales: Vakarin, Vladyslav, Melati, Daniele, Dinh, Thi Thuy Duong, Le Roux, Xavier, Kan, Warren Kut King, Dupré, Cécilia, Szelag, Bertrand, Monfray, Stéphane, Boeuf, Frédéric, Cheben, Pavel, Cassan, Eric, Marris-Morini, Delphine, Vivien, Laurent, Alonso-Ramos, Carlos Alberto
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8620797/
https://www.ncbi.nlm.nih.gov/pubmed/34835713
http://dx.doi.org/10.3390/nano11112949

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8620797/
https://www.ncbi.nlm.nih.gov/pubmed/34835713
http://dx.doi.org/10.3390/nano11112949

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