Transfer of Tactile Sensors Using Stiction Effect Temporary Handling

A novel method for transfer of tactile sensors using stiction effect temporary handling (SETH) is presented to simplify the microelectromechanical-system (MEMS)/CMOS integration process, improve the process reliability and electrical performance, and reduce material constriction. The structure of th...

Descripción completa

Detalles Bibliográficos
Autores principales: Zhong, Peng, Sun, Ke, Zheng, Chaoyue, Yang, Heng, Li, Xinxin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8621382/
https://www.ncbi.nlm.nih.gov/pubmed/34832742
http://dx.doi.org/10.3390/mi12111330

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8621382/
https://www.ncbi.nlm.nih.gov/pubmed/34832742
http://dx.doi.org/10.3390/mi12111330

Ejemplares similares