Controlling Resonator Nonlinearities and Modes through Geometry Optimization

Controlling the nonlinearities of MEMS resonators is critical for their successful implementation in a wide range of sensing, signal conditioning, and filtering applications. Here, we utilize a passive technique based on geometry optimization to control the nonlinearities and the dynamical response...

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Detalles Bibliográficos
Autores principales: Hajjaj, Amal Z., Jaber, Nizar
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8621467/
https://www.ncbi.nlm.nih.gov/pubmed/34832793
http://dx.doi.org/10.3390/mi12111381

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8621467/
https://www.ncbi.nlm.nih.gov/pubmed/34832793
http://dx.doi.org/10.3390/mi12111381

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