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Controlling Resonator Nonlinearities and Modes through Geometry Optimization
Controlling the nonlinearities of MEMS resonators is critical for their successful implementation in a wide range of sensing, signal conditioning, and filtering applications. Here, we utilize a passive technique based on geometry optimization to control the nonlinearities and the dynamical response...
Autores principales: | Hajjaj, Amal Z., Jaber, Nizar |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8621467/ https://www.ncbi.nlm.nih.gov/pubmed/34832793 http://dx.doi.org/10.3390/mi12111381 |
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