Dual-Resonator-Based (DRB) and Multiple-Resonator-Based (MRB) MEMS Sensors: A Review

Single-resonator-based (SRB) sensors have thrived in many sensing applications. However, they cannot meet the high-sensitivity requirement of future high-end markets such as ultra-small mass sensors and ultra-low accelerometers, and are vulnerable to environmental influences. It is fortunate that th...

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Detalles Bibliográficos
Autores principales: Zhu, Yusi, Zhao, Zhan, Fang, Zhen, Du, Lidong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8621490/
https://www.ncbi.nlm.nih.gov/pubmed/34832773
http://dx.doi.org/10.3390/mi12111361

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8621490/
https://www.ncbi.nlm.nih.gov/pubmed/34832773
http://dx.doi.org/10.3390/mi12111361

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