Research on Characteristics of Broadband Acoustic Sensor Based on Silicon-Based Grooved Microring Resonator

In order to meet the requirements of having a small structure, a wide frequency band, and high sensitivity for acoustic signal measurement, an acoustic sensor based on a silicon-based grooved microring resonator is proposed. In this paper, the effective refractive index method and the finite element...

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Detalles Bibliográficos
Autores principales: Cui, Jiangong, Yu, Yaxin, Chu, Xiaoxia, Zhao, Rongyu, Zhu, Min, Zhang, Wendong, Zhang, Guojun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8622330/
https://www.ncbi.nlm.nih.gov/pubmed/34832749
http://dx.doi.org/10.3390/mi12111338

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8622330/
https://www.ncbi.nlm.nih.gov/pubmed/34832749
http://dx.doi.org/10.3390/mi12111338

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