Traceable Nanoscale Measurements of High Dielectric Constant by Scanning Microwave Microscopy

The importance of high dielectric constant materials in the development of high frequency nano-electronic devices is undeniable. Their polarization properties are directly dependent on the value of their relative permittivity. We report here on the nanoscale metrological quantification of the dielec...

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Detalles Bibliográficos
Autores principales: Richert, Damien, Morán-Meza, José, Kaja, Khaled, Delvallée, Alexandra, Allal, Djamel, Gautier, Brice, Piquemal, François
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8622384/
https://www.ncbi.nlm.nih.gov/pubmed/34835868
http://dx.doi.org/10.3390/nano11113104

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8622384/
https://www.ncbi.nlm.nih.gov/pubmed/34835868
http://dx.doi.org/10.3390/nano11113104

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