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Traceable Nanoscale Measurements of High Dielectric Constant by Scanning Microwave Microscopy
The importance of high dielectric constant materials in the development of high frequency nano-electronic devices is undeniable. Their polarization properties are directly dependent on the value of their relative permittivity. We report here on the nanoscale metrological quantification of the dielec...
| Autores principales: | , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8622384/ https://www.ncbi.nlm.nih.gov/pubmed/34835868 http://dx.doi.org/10.3390/nano11113104 |