Fast Synchronization Method of Comb-Actuated MEMS Mirror Pair for LiDAR Application

MEMS-based LiDAR (micro-electro–mechanical system based light detection and ranging), with a low cost and small volume, becomes a promising solution for the two-dimensional (2D) and three-dimensional (3D) optical imaging. A semi-coaxial MEMS LiDAR design, based on a synchronous MEMS mirror pair, was...

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Detalles Bibliográficos
Autores principales: Xu, Fahu, Qiao, Dayong, Xia, Changfeng, Song, Xiumin, He, Yaojun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8622424/
https://www.ncbi.nlm.nih.gov/pubmed/34832701
http://dx.doi.org/10.3390/mi12111292

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8622424/
https://www.ncbi.nlm.nih.gov/pubmed/34832701
http://dx.doi.org/10.3390/mi12111292

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