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Fast Synchronization Method of Comb-Actuated MEMS Mirror Pair for LiDAR Application
MEMS-based LiDAR (micro-electro–mechanical system based light detection and ranging), with a low cost and small volume, becomes a promising solution for the two-dimensional (2D) and three-dimensional (3D) optical imaging. A semi-coaxial MEMS LiDAR design, based on a synchronous MEMS mirror pair, was...
Autores principales: | Xu, Fahu, Qiao, Dayong, Xia, Changfeng, Song, Xiumin, He, Yaojun |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8622424/ https://www.ncbi.nlm.nih.gov/pubmed/34832701 http://dx.doi.org/10.3390/mi12111292 |
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