ZRO Drift Reduction of MEMS Gyroscopes via Internal and Packaging Stress Release

Zero-rate output (ZRO) drift induces deteriorated micro-electromechanical system (MEMS) gyroscope performances, severely limiting its practical applications. Hence, it is vital to explore an effective method toward ZRO drift reduction. In this work, we conduct an elaborate investigation on the impac...

Descripción completa

Detalles Bibliográficos
Autores principales: Xu, Pengfei, Wei, Zhenyu, Jia, Lu, Zhao, Yongmei, Han, Guowei, Si, Chaowei, Ning, Jin, Yang, Fuhua
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8622569/
https://www.ncbi.nlm.nih.gov/pubmed/34832741
http://dx.doi.org/10.3390/mi12111329

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8622569/
https://www.ncbi.nlm.nih.gov/pubmed/34832741
http://dx.doi.org/10.3390/mi12111329

Ejemplares similares