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ZRO Drift Reduction of MEMS Gyroscopes via Internal and Packaging Stress Release

Zero-rate output (ZRO) drift induces deteriorated micro-electromechanical system (MEMS) gyroscope performances, severely limiting its practical applications. Hence, it is vital to explore an effective method toward ZRO drift reduction. In this work, we conduct an elaborate investigation on the impac...

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Detalles Bibliográficos
Autores principales:	Xu, Pengfei, Wei, Zhenyu, Jia, Lu, Zhao, Yongmei, Han, Guowei, Si, Chaowei, Ning, Jin, Yang, Fuhua
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8622569/ https://www.ncbi.nlm.nih.gov/pubmed/34832741 http://dx.doi.org/10.3390/mi12111329

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