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Particle Surface Modification in the Near-Electrode Region of an RF Discharge

The results of a study on particles’ surfaces after being exposed to the near-electrode region of a radio frequency (RF) discharge are presented. It was experimentally displayed that metal starts being deposited on the surface of particles levitating above the lower electrode of the discharge chambe...

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Detalles Bibliográficos
Autores principales: Kononov, Evgenii Aleksandrovich, Vasiliev, Mikhail Mikhailovich, Vasilieva, Elena Valeryevna, Petrov, Oleg Fedorovich
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8622773/
https://www.ncbi.nlm.nih.gov/pubmed/34835695
http://dx.doi.org/10.3390/nano11112931