Glass Substrate Dust Removal Using 233 fs Laser-Generated Shockwave

Eliminating dust is gaining importance as a critical requirement in the display panel manufacturing process. The pixel resolution of display panels is increasing rapidly, which means that even small dust particles on the order of a few micrometers can affect them. Conventional surface cleaning metho...

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Detalles Bibliográficos
Autores principales: Kim, Myeongjun, Choi, Philgong, Jo, Jae Heung, Kim, Kyunghan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8624490/
https://www.ncbi.nlm.nih.gov/pubmed/34832794
http://dx.doi.org/10.3390/mi12111382

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8624490/
https://www.ncbi.nlm.nih.gov/pubmed/34832794
http://dx.doi.org/10.3390/mi12111382

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