Cargando…
Glass Substrate Dust Removal Using 233 fs Laser-Generated Shockwave
Eliminating dust is gaining importance as a critical requirement in the display panel manufacturing process. The pixel resolution of display panels is increasing rapidly, which means that even small dust particles on the order of a few micrometers can affect them. Conventional surface cleaning metho...
| Autores principales: | , , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2021
|
| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8624490/ https://www.ncbi.nlm.nih.gov/pubmed/34832794 http://dx.doi.org/10.3390/mi12111382 |