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Pattern transfer of large-scale thin membranes with controllable self-delamination interface for integrated functional systems
Direct transfer of pre-patterned device-grade nano-to-microscale materials highly benefits many existing and potential, high performance, heterogeneously integrated functional systems over conventional lithography-based microfabrication. We present, in combined theory and experiment, a self-delamina...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8626417/ https://www.ncbi.nlm.nih.gov/pubmed/34836961 http://dx.doi.org/10.1038/s41467-021-27208-5 |