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Fabrication and Evaluation of a Flexible MEMS-Based Microthermal Flow Sensor
Based on the results of computational fluid dynamics simulations, this study designed and fabricated a flexible thermal-type micro flow sensor comprising one microheater and two thermistors using a micro-electromechanical system (MEMS) process on a flexible polyimide film. The thermistors were conne...
Autores principales: | , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8662401/ https://www.ncbi.nlm.nih.gov/pubmed/34884155 http://dx.doi.org/10.3390/s21238153 |