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Fabrication and Evaluation of a Flexible MEMS-Based Microthermal Flow Sensor

Based on the results of computational fluid dynamics simulations, this study designed and fabricated a flexible thermal-type micro flow sensor comprising one microheater and two thermistors using a micro-electromechanical system (MEMS) process on a flexible polyimide film. The thermistors were conne...

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Detalles Bibliográficos
Autores principales:	Cho, Myoung-Ock, Jang, Woojin, Lim, Si-Hyung
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8662401/ https://www.ncbi.nlm.nih.gov/pubmed/34884155 http://dx.doi.org/10.3390/s21238153

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