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A Comprehensive Review on the Optical Micro-Electromechanical Sensors for the Biomedical Application
This study presented an overview of current developments in optical micro-electromechanical systems in biomedical applications. Optical micro-electromechanical system (MEMS) is a particular class of MEMS technology. It combines micro-optics, mechanical elements, and electronics, called the micro-opt...
Autores principales: | , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Frontiers Media S.A.
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8674308/ https://www.ncbi.nlm.nih.gov/pubmed/34926383 http://dx.doi.org/10.3389/fpubh.2021.759032 |