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Passivation of miniature microwave coplanar waveguides using a thin film fluoropolymer electret
The insertion losses of miniature gold/silicon-on-insulator (SOI) coplanar waveguides (CPW) are rendered low, stable, and light insensitive when covered with a thin film (95 nm) fluoropolymer deposited by a trifluoromethane (CHF(3)) plasma. Microwave characterization (0–50 GHz) of the CPWs indicates...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8677788/ https://www.ncbi.nlm.nih.gov/pubmed/34916566 http://dx.doi.org/10.1038/s41598-021-03540-0 |