Study of aerodynamic focusing lens stacks (ALS) for long focal length aerosol-assisted focused chemical vapor deposition (AAFCVD)

Mask-free direct printing can alleviate the high cost and high consumption involved in photo-lithography for chip processing. Most of their technical routes are based on the traditional short focal length nozzles, which is suffered from higher probability of nozzle retardation or clogging as well as...

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Detalles Bibliográficos
Autores principales: Lu, Han Lun, Li, Lei, Liang, Xi Hui, Wang, Jun Jun, Liu, Ning Yang, Chen, Zhi Tao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: The Royal Society of Chemistry 2021
Materias:
Chemistry
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8694530/
https://www.ncbi.nlm.nih.gov/pubmed/35424419
http://dx.doi.org/10.1039/d0ra08447f

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8694530/
https://www.ncbi.nlm.nih.gov/pubmed/35424419
http://dx.doi.org/10.1039/d0ra08447f

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