AZO-Based ZnO Nanosheet MEMS Sensor with Different Al Concentrations for Enhanced H(2)S Gas Sensing

The properties of H(2)S gas sensing were investigated using a ZnO nanostructure prepared with AZO (zinc oxide with aluminium) and Al surfaces which were developed on a MEMS (Micro Electromechanical System) device. Hydrothermal synthesis was implemented for the deposition of the ZnO nanostructure. To...

Descripción completa

Detalles Bibliográficos
Autores principales: Nagarjuna, Yempati, Lin, Jun-Cong, Wang, Sheng-Chang, Hsiao, Wen-Tse, Hsiao, Yu-Jen
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8704406/
https://www.ncbi.nlm.nih.gov/pubmed/34947725
http://dx.doi.org/10.3390/nano11123377

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8704406/
https://www.ncbi.nlm.nih.gov/pubmed/34947725
http://dx.doi.org/10.3390/nano11123377

Ejemplares similares