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AZO-Based ZnO Nanosheet MEMS Sensor with Different Al Concentrations for Enhanced H(2)S Gas Sensing
The properties of H(2)S gas sensing were investigated using a ZnO nanostructure prepared with AZO (zinc oxide with aluminium) and Al surfaces which were developed on a MEMS (Micro Electromechanical System) device. Hydrothermal synthesis was implemented for the deposition of the ZnO nanostructure. To...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8704406/ https://www.ncbi.nlm.nih.gov/pubmed/34947725 http://dx.doi.org/10.3390/nano11123377 |