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AZO-Based ZnO Nanosheet MEMS Sensor with Different Al Concentrations for Enhanced H(2)S Gas Sensing

The properties of H(2)S gas sensing were investigated using a ZnO nanostructure prepared with AZO (zinc oxide with aluminium) and Al surfaces which were developed on a MEMS (Micro Electromechanical System) device. Hydrothermal synthesis was implemented for the deposition of the ZnO nanostructure. To...

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Detalles Bibliográficos
Autores principales:	Nagarjuna, Yempati, Lin, Jun-Cong, Wang, Sheng-Chang, Hsiao, Wen-Tse, Hsiao, Yu-Jen
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8704406/ https://www.ncbi.nlm.nih.gov/pubmed/34947725 http://dx.doi.org/10.3390/nano11123377

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