Enhancing AlN PMUTs’ Acoustic Responsivity within a MEMS-on-CMOS Process

In this paper, guidelines for the optimization of piezoelectrical micromachined ultrasound transducers (PMUTs) monolithically integrated over a CMOS technology are developed. Higher acoustic pressure is produced by PMUTs with a thin layer of AlN piezoelectrical material and Si(3)N(4) as a passive la...

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Detalles Bibliográficos
Autores principales: Ledesma, Eyglis, Zamora, Ivan, Uranga, Arantxa, Torres, Francesc, Barniol, Núria
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8705788/
https://www.ncbi.nlm.nih.gov/pubmed/34960541
http://dx.doi.org/10.3390/s21248447

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8705788/
https://www.ncbi.nlm.nih.gov/pubmed/34960541
http://dx.doi.org/10.3390/s21248447

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