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Enhancing AlN PMUTs’ Acoustic Responsivity within a MEMS-on-CMOS Process
In this paper, guidelines for the optimization of piezoelectrical micromachined ultrasound transducers (PMUTs) monolithically integrated over a CMOS technology are developed. Higher acoustic pressure is produced by PMUTs with a thin layer of AlN piezoelectrical material and Si(3)N(4) as a passive la...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8705788/ https://www.ncbi.nlm.nih.gov/pubmed/34960541 http://dx.doi.org/10.3390/s21248447 |