Enhancing the Shock Response Performance of Micromachined Silicon Resonant Accelerometers by Electrostatic Active Damping Control

This paper presents a micromachined silicon resonant accelerometer based on electrostatic active damping control, which can improve the shock response performance of the accelerometer. In the accelerometer, an electrostatic active damping structure and damping control circuit are designed to improve...

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Detalles Bibliográficos
Autores principales: Huang, Libin, Jiang, Kai, Wang, Peng, Zhang, Meimei, Ding, Xukai, Li, Hongsheng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8706425/
https://www.ncbi.nlm.nih.gov/pubmed/34945398
http://dx.doi.org/10.3390/mi12121548

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8706425/
https://www.ncbi.nlm.nih.gov/pubmed/34945398
http://dx.doi.org/10.3390/mi12121548

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