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Enhancing the Shock Response Performance of Micromachined Silicon Resonant Accelerometers by Electrostatic Active Damping Control

This paper presents a micromachined silicon resonant accelerometer based on electrostatic active damping control, which can improve the shock response performance of the accelerometer. In the accelerometer, an electrostatic active damping structure and damping control circuit are designed to improve...

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Detalles Bibliográficos
Autores principales: Huang, Libin, Jiang, Kai, Wang, Peng, Zhang, Meimei, Ding, Xukai, Li, Hongsheng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8706425/
https://www.ncbi.nlm.nih.gov/pubmed/34945398
http://dx.doi.org/10.3390/mi12121548
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author Huang, Libin
Jiang, Kai
Wang, Peng
Zhang, Meimei
Ding, Xukai
Li, Hongsheng
author_facet Huang, Libin
Jiang, Kai
Wang, Peng
Zhang, Meimei
Ding, Xukai
Li, Hongsheng
author_sort Huang, Libin
collection PubMed
description This paper presents a micromachined silicon resonant accelerometer based on electrostatic active damping control, which can improve the shock response performance of the accelerometer. In the accelerometer, an electrostatic active damping structure and damping control circuit are designed to improve the equivalent damping coefficient of the system. System-level Simulink modeling and simulation of the accelerometer with an electrostatic active damping closed-loop control link were carried out. The simulation results indicate that the system can quickly return to normal output without an obvious vibration process after the shock. The fabricated and packaged accelerometer was connected to an external test circuit for shock performance testing. The stabilization time of the accelerometer after a 100 g, 3–5 ms half-sine shock was reduced from 19.8 to 5.6 s through use of the damping control. Furthermore, the change in deviation before and after the shock without damping control was 0.8197 mg, whereas it was 0.1715 mg with damping control. The experimental results demonstrate that the electrostatic active damping control can effectively improve the dynamic performance of the micromachined silicon resonant accelerometer.
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spelling pubmed-87064252021-12-25 Enhancing the Shock Response Performance of Micromachined Silicon Resonant Accelerometers by Electrostatic Active Damping Control Huang, Libin Jiang, Kai Wang, Peng Zhang, Meimei Ding, Xukai Li, Hongsheng Micromachines (Basel) Article This paper presents a micromachined silicon resonant accelerometer based on electrostatic active damping control, which can improve the shock response performance of the accelerometer. In the accelerometer, an electrostatic active damping structure and damping control circuit are designed to improve the equivalent damping coefficient of the system. System-level Simulink modeling and simulation of the accelerometer with an electrostatic active damping closed-loop control link were carried out. The simulation results indicate that the system can quickly return to normal output without an obvious vibration process after the shock. The fabricated and packaged accelerometer was connected to an external test circuit for shock performance testing. The stabilization time of the accelerometer after a 100 g, 3–5 ms half-sine shock was reduced from 19.8 to 5.6 s through use of the damping control. Furthermore, the change in deviation before and after the shock without damping control was 0.8197 mg, whereas it was 0.1715 mg with damping control. The experimental results demonstrate that the electrostatic active damping control can effectively improve the dynamic performance of the micromachined silicon resonant accelerometer. MDPI 2021-12-12 /pmc/articles/PMC8706425/ /pubmed/34945398 http://dx.doi.org/10.3390/mi12121548 Text en © 2021 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Huang, Libin
Jiang, Kai
Wang, Peng
Zhang, Meimei
Ding, Xukai
Li, Hongsheng
Enhancing the Shock Response Performance of Micromachined Silicon Resonant Accelerometers by Electrostatic Active Damping Control
title Enhancing the Shock Response Performance of Micromachined Silicon Resonant Accelerometers by Electrostatic Active Damping Control
title_full Enhancing the Shock Response Performance of Micromachined Silicon Resonant Accelerometers by Electrostatic Active Damping Control
title_fullStr Enhancing the Shock Response Performance of Micromachined Silicon Resonant Accelerometers by Electrostatic Active Damping Control
title_full_unstemmed Enhancing the Shock Response Performance of Micromachined Silicon Resonant Accelerometers by Electrostatic Active Damping Control
title_short Enhancing the Shock Response Performance of Micromachined Silicon Resonant Accelerometers by Electrostatic Active Damping Control
title_sort enhancing the shock response performance of micromachined silicon resonant accelerometers by electrostatic active damping control
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8706425/
https://www.ncbi.nlm.nih.gov/pubmed/34945398
http://dx.doi.org/10.3390/mi12121548
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