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Enhancing the Shock Response Performance of Micromachined Silicon Resonant Accelerometers by Electrostatic Active Damping Control
This paper presents a micromachined silicon resonant accelerometer based on electrostatic active damping control, which can improve the shock response performance of the accelerometer. In the accelerometer, an electrostatic active damping structure and damping control circuit are designed to improve...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8706425/ https://www.ncbi.nlm.nih.gov/pubmed/34945398 http://dx.doi.org/10.3390/mi12121548 |