Multiphoton Absorption Simulation of Sapphire Substrate under the Action of Femtosecond Laser for Larger Density of Pattern-Related Process Windows

It is essential to develop pattern-related process windows on substrate surface for reducing the dislocation density of wide bandgap semiconductor film growth. For extremely high instantaneous intensity and excellent photon absorption rate, femtosecond lasers are currently being increasingly adopted...

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Detalles Bibliográficos
Autores principales: Cai, Xintian, Ji, Chaoyue, Li, Changkai, Tian, Zhiqiang, Wang, Xuan, Lei, Cheng, Liu, Sheng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8706633/
https://www.ncbi.nlm.nih.gov/pubmed/34945421
http://dx.doi.org/10.3390/mi12121571

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8706633/
https://www.ncbi.nlm.nih.gov/pubmed/34945421
http://dx.doi.org/10.3390/mi12121571

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