Combination of Ceramic Laser Micromachining and Printed Technology as a Way for Rapid Prototyping Semiconductor Gas Sensors

The work describes a fast and flexible micro/nano fabrication and manufacturing method for ceramic Micro-electromechanical systems (MEMS)sensors. Rapid prototyping techniques are demonstrated for metal oxide sensor fabrication in the form of a complete MEMS device, which could be used as a compact m...

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Detalles Bibliográficos
Autores principales: Samotaev, Nikolay, Oblov, Konstantin, Dzhumaev, Pavel, Fritsch, Marco, Mosch, Sindy, Vinnichenko, Mykola, Trofimenko, Nikolai, Baumgärtner, Christoph, Fuchs, Franz-Martin, Wissmeier, Lena
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8707025/
https://www.ncbi.nlm.nih.gov/pubmed/34945292
http://dx.doi.org/10.3390/mi12121440

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8707025/
https://www.ncbi.nlm.nih.gov/pubmed/34945292
http://dx.doi.org/10.3390/mi12121440

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