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Wafer-Level 3D Integration Based on Poly (Diallyl Phthalate) Adhesive Bonding
Three-dimensional integration technology provides a promising total solution that can be used to achieve system-level integration with high function density and low cost. In this study, a wafer-level 3D integration technology using PDAP as an intermediate bonding polymer was applied effectively for...
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8707114/ https://www.ncbi.nlm.nih.gov/pubmed/34945436 http://dx.doi.org/10.3390/mi12121586 |