Deposition of Gadolinia-Doped Zirconia Layers Using Metalorganic Compounds at Low Temperatures

This paper shows the results of an investigation on the synthesis of non-porous and nanocrystalline ZrO(2)-Gd(2)O(3) layers by metalorganic chemical vapor deposition (MOCVD) with the use of Zr(tmhd)(4) (tetrakis(2,2,6,6-tetramethyl-3,5-heptanedionato)zirconium(IV)) and Gd(tmhd)(3) (tris(2,2,6,6-tetr...

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Detalles Bibliográficos
Autor principal: Sawka, Agata
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8707791/
https://www.ncbi.nlm.nih.gov/pubmed/34947165
http://dx.doi.org/10.3390/ma14247573

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8707791/
https://www.ncbi.nlm.nih.gov/pubmed/34947165
http://dx.doi.org/10.3390/ma14247573

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