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Deposition of Gadolinia-Doped Zirconia Layers Using Metalorganic Compounds at Low Temperatures
This paper shows the results of an investigation on the synthesis of non-porous and nanocrystalline ZrO(2)-Gd(2)O(3) layers by metalorganic chemical vapor deposition (MOCVD) with the use of Zr(tmhd)(4) (tetrakis(2,2,6,6-tetramethyl-3,5-heptanedionato)zirconium(IV)) and Gd(tmhd)(3) (tris(2,2,6,6-tetr...
Autor principal: | Sawka, Agata |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8707791/ https://www.ncbi.nlm.nih.gov/pubmed/34947165 http://dx.doi.org/10.3390/ma14247573 |
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