A Thermopile Detector Based on Micro-Bridges for Heat Transfer

A thermopile detector with their thermocouples distributed in micro-bridges is designed and investigated in this work. The thermopile detector consists of 16 pairs of n-poly-Si/p-poly-Si thermocouples, which are fabricated using a low-cost, high-throughput CMOS process. The micro-bridges are realize...

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Detalles Bibliográficos
Autores principales: Zhou, Na, Ding, Xuefeng, Li, Hongbo, Ni, Yue, Pu, Yonglong, Mao, Haiyang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8708090/
https://www.ncbi.nlm.nih.gov/pubmed/34945404
http://dx.doi.org/10.3390/mi12121554

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8708090/
https://www.ncbi.nlm.nih.gov/pubmed/34945404
http://dx.doi.org/10.3390/mi12121554

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